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Study on modeling and real-time display of AFM based robotic nano-imprint
Authors
王越超
田孝军
董再励
Publication date
1 January 2007
Publisher
Abstract
利用AFM探针刻画方式可进行MEMS掩膜图案等的制备与修复研究,本文针对软朔性材料,建立了AFM探针刻画时的刻痕尺寸模型,依据该模型及探针的实际受力与位置信息,可得到刻痕的实时位置与尺寸,并借助虚拟现实技术将刻画过程实时显示在视觉界面上。在上述研究基础上,操作者可在线控制纳米刻画的过程及结果,对聚酯基片的纳米刻画实验初步验证了上述模型的有效性。</p
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Shenyang Institute of Automation,Chinese Academy Of Sciences
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Last time updated on 09/01/2019