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research
Research on the Mechanism and Kinetics of Oxidation of Silicon in Air Semiannual Report, 1 Jun. - 30 Nov. 1966
Authors
F. Lukes
R. Rai
K. Vedam
Publication date
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Abstract
Ellipsometric studies on mechanism and kinetics of thin oxide films on silicon in ai
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oai:casi.ntrs.nasa.gov:1967000...
Last time updated on 02/09/2017
