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research
Development of ion implantation techniques for microelectronics
Authors
H. L. Dunlap
R. G. Hunsperger
O. J. Marsh
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Abstract
Ion implantation process for fabricating active devices in high bandgap semiconductor materials for high temperature operatio
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oai:casi.ntrs.nasa.gov:1969001...
Last time updated on 02/09/2017
