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research
The development of radiation resistant insulating layers for planar silicon technology, 29 May 1968 - 28 June 1969
Authors
R. P. Donovan
L. K. Monteith
M. Simons
Publication date
Publisher
Abstract
Ion implantation method for improving radiation resistance of thermal oxides on silico
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oai:casi.ntrs.nasa.gov:1970001...
Last time updated on 02/09/2017
