Optically isolated logarithmic nanoammeter capable of floating to 5 kilovolts

Abstract

A logarithmic current-measuring instrument was developed to measure plasma coupling currents at a common mode voltage of 5 kilovolts. Positive or negative currents can be measured from 10 to the -9th power to .001 ampere direct current. Optical isolation is used to control input switching and to provide data referenced to ground potential. Analog meter readouts as well as zero to five volt outputs are provided for peripheral data collection. Six independent channels are provided. Three measure positive currents, and three measure negative currents. Although designed for vacuum operation, it can be used equally well in air to measure low currents at high common mode voltages