Study of TiN/SiO2 composite films prepared by the combined method of multi-arc ion plating and magnetron sputtering

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Publication date
1 January 2015
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Abstract

In this paper,we combined the advantages of the two methods which are multi-arc ion plating and magnetron sputtering to prepare TiN/SiO2 composite films. The SEM results show that the TiN/SiO2 composite film is more compact and smooth than the TiN film,

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