This paper mainly introduces the development of a cantilever driving scanner. Based on this scanner a up-scanning mode of SFM has been developed which was originally aiming at mounting on the top of NMM as a probing sensor. SFM was connected to electronic control unit of CSPM a nano-instrument of CBeing to do experiment and test. As a result, it successfully scanned and imaged the sample within 23μm×23μm×5μm scanning range. Tests, analysis and calculations shows that its lateral and vertical resolutions are 0.25nm and 0.1nn respectively on all axes for all scan sizes, and lateral accuracy is 5% on lateral axes for all scan sizes without any software and hardware correction and compensation
