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Study of ICP-induced In doping and the properties of GaN-based LED wafers and devices

Abstract

GaN材料属于第三代半导体材料,具有宽的直接带隙以及优异的物理和化学性质,是制作发光器件和光伏器件的理想材料。在信息显示领域,GaN基高亮度蓝、绿发光二极管可以用于户外大屏幕全色显示以及交通信号灯等方面;在照明领域,GaN基白光LED可以用于背光源、路灯和景观照明以及通用照明等。GaN基器件的研究已经取得巨大进展,但是在器件的制备过程中仍存在一些问题,如GaN材料的p型欧姆接触问题则是限制GaN器件发展的主要因素之一。有两方面的原因阻碍低阻p-GaN欧姆接触的实现:一方面是难以生长高空穴浓度的p-GaN材料;另一方面是缺乏合适的接触金属材料。目前用于提高p-GaN材料空穴浓度的方法主要有热退火...GaN-based wide-band gap semiconductors belong to the third generation of semiconductor materials, which are the ideal materials of emitting devices and photovoltaic devices because of their excellent physical and chemical properties. In the field of information display, GaN-based high-brightness blue and green light emitting diodes (LEDs) can be used in outdoor large screen display and traffic lig...学位:工学硕士院系专业:信息科学与技术学院_光学工程学号:2312012115289

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