硅基微型储能系统，鉴于其良好的工艺制备兼容性、与微纳米智能器件的可集成性，是近些年来重要的研究发展方向。微型储能系统，可作为独立片上供电系统，为M/NEMS（Micro/NanoElectroMechanicalSystems，M/NEMS）等微纳米器件供电，如智能卡、微型传感器与执行器、微型机器人等，在生物医药、军工、金融、航天、环境监测、智能通信、纳米科技等众多智能领域都有较大的应用潜力。其中，三维硅基微型锂/钠离子电池储能系统，由于具备高能量/功率密度、优异的电化学循环稳定性、工作环境范围大、易微型化等优点，是目前实现能源微型化、集成化、绿色化的最优选择之一，也是当前微型储能系统领域的研...In recent years, fabricating Si-based micro energy storage system, due to its good compatibility during the fabrication process, and the intelligent integration with micro-nano devices, has become an important research&development (R&D) direction. Micro-energy storage system can be used as independent on-chip power supply for M/NEMS (Micro/Nano Electro Mechanical Systems, M/NEMS) or other micro/na...学位：工学博士院系专业：物理科学与技术学院_微电子学与固体电子学学号：1982012015390
