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一种面向半导体工艺设备的故障诊断方法
Authors
于淼
廖柯
+3 more
段彬
胡国良
里鹏
Publication date
4 July 2017
Publisher
Abstract
本发明公开了一种面向半导体工艺设备的故障诊断方法,首先建立包括模糊规则库、推理机的专家系统;进一步的,针对半导体工艺设备实时监测参数进行模糊化处理,生成模糊事实;推理机基于模糊事实,通过与模糊规则库的交互来进行模糊推理,生成故障诊断结果;基于故障诊断结果的实际应用情况,进行面向模糊规则库的规则强度自学习修正。本发明基于rete算法进行模糊推理进而得出故障诊断结果,并充分结合实际故障诊断应用情况来进行模糊规则库的规则强度自学习修正,提高了半导体工艺设备故障诊断的精准水平和自动化水平,保障了半导体工艺的高效稳定运行
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Institutional Repository of Institute of Automation, CAS
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oai:ir.sia.cn/:173321/20590
Last time updated on 12/08/2017
Shenyang Institute of Automation,Chinese Academy Of Sciences
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:ir.sia.cn/:173321/20590
Last time updated on 12/02/2018