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Depositon of nanometric SiOxHyCz films at different substrate temperatures by an atmospheric pressure microwave plasma torch (TIA) : first steps towards self-assembled 3-dimensional nano-sensors
Authors
Z. Bouchkour
G. Bouscarrat
+6 more
Christelle Dublanche-Tixier
Cédric Jaoul
Xavier Landreau
B. Lanfant
Thérèse Merle-Méjean
Pascal Tristant
Publication date
24 July 2011
Publisher
HAL CCSD
Abstract
International audienc
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oai:HAL:hal-00944747v1
Last time updated on 12/11/2016