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Influence of the deposition parameters on the texture of boron nitride thin films synthesized in a microwave plasma-enhanced reactor
Authors
A. Ahaitouf
A. Bath
+3 more
M. Eliaoui
A. Soltani
P. Thevenin
Publication date
1 January 2006
Publisher
'Elsevier BV'
Abstract
International audienc
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oai:HAL:hal-00323142v1
Last time updated on 19/06/2021