A new generation of 3D silicon pixel detectors with a small pixel size of
50×50 and 25×100 μm2 is being developed for the HL-LHC
tracker upgrades. The radiation hardness of such detectors was studied in beam
tests after irradiation to HL-LHC fluences up to 1.4×1016
neq/cm2. At this fluence, an operation voltage of only 100 V
is needed to achieve 97% hit efficiency, with a power dissipation of 13
mW/cm2 at -25∘C, considerably lower than for previous 3D sensor
generations and planar sensors.Comment: 5 pages, 2 figures, Proceedings of TIPP 2017, Beijing (International
Conference on The Technology and Instrumentation in Particle Physics 2017