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Deposition of semiconductive films in SF6 ion-ion plasma
Authors
Ane Aanesland
D.V. Rafalskyi
Publication date
15 July 2014
Publisher
HAL CCSD
Abstract
International audienc
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HAL-Polytechnique
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oai:HAL:hal-02611323v1
Last time updated on 29/05/2020
HAL-OBSPM
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:HAL:hal-02611323v1
Last time updated on 29/05/2020