Fabrication and magnetic control of Y3Fe5O12 cantilevers

Abstract

We have fabricated ferrite cantilevers in which their vibrational properties can be controlled by external magnetic fields. Submicron-scale cantilever structures were made from Y3Fe5O12 (YIG) films by physical etching combined with use of a focused ion beam milling technique. We found that the cantilevers exhibit two resonance modes which correspond to horizontal and vertical vibrations. Under external magnetic fields, the resonance frequency of the horizontal mode increases, while that of the vertical mode decreases, quantitatively consistent with our numerical simulation for magnetic forces. The changes in resonance frequencies with magnetic fields reach a few percent, showing that efficient magnetic control of resonance frequencies was achieved.Comment: Appl. Phys. Let