Optimization of HiPIMS metal coating interface and properties by in-situ plasma etching pretreatment

Abstract

International audienceDeposition of dense Ti and Zr coatings by high power impulse magnetron sputtering (HiPIMS) was performed to enhance the lifespan of stainless steel 304L infrastructures and tools in corrosive environments. The effect of Ar+, Ti+ and Zr+ in-situ etching pretreatment on the substrate-coating interface and coating properties was investigated. Characterization by SEM and TEM shows the polycrystalline structure, high density and adhesion of metal coatings on the substrate. XPS analysis reveals surface modifications due to etching pretreatments. Electrochemical measurements quantify the improvement in corrosion resistance in saline environments due to etching and coating with a 200-nm-thick metal layer