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Potential Solutions for Atomic Precision Etching
Authors
R Achutharaman
S Banna
+7 more
R Blanc
P. Brichon
G. Cunge
E. Despiau-Pujo
O. Joubert
L. Vallier
Y Zhang
Publication date
21 April 2014
Publisher
HAL CCSD
Abstract
International audienc
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HAL-CEA
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oai:HAL:hal-01798418v1
Last time updated on 20/03/2019
Hal - Université Grenoble Alpes
See this paper in CORE
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oai:HAL:hal-01798418v1
Last time updated on 11/06/2018
