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PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors
Authors
Solène Brottet
Matthieu Bugnet
+10 more
Thierry Epicier
Siddardha Koneti
Martine Le Berre
Annie Malchere
Christophe Malhaire
Liviu Militaru
Etienne Puyoo
Rémi Rafael
Lucian Roiban
Daniel Thomas
Publication date
6 November 2018
Publisher
HAL CCSD
Abstract
International audienc
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