Fabrication of a microfluidic chip for PCR applications

Abstract

The fabrication of a microfluidic chip for application to polymerase chain (PCR) is presented. In this chip, a micro peristaltic pump was integrated to pump a reactant droplet. PCR reaction chambers, Pt heaters, temperature sensors, and pn-diodes were fabricated on a silicon wafer. Access holes for fluid and electrical connections, and pump membranes were etched in a Pyrex wafer, which was anodically bonded onto the silicon. Three PZT discs were glued on pump membranes to actuate the micro peristaltic pump