Quantum fluctuations give rise to van der Waals and Casimir forces that
dominate the interaction between electrically neutral objects at sub-micron
separations. Under the trend of miniaturization, such quantum electrodynamical
effects are expected to play an important role in micro- and nano-mechanical
devices. Nevertheless, utilization of Casimir forces on the chip level remains
a major challenge because all experiments so far require an external object to
be manually positioned close to the mechanical element. Here, by integrating a
force-sensing micromechanical beam and an electrostatic actuator on a single
chip, we demonstrate the Casimir effect between two micromachined silicon
components on the same substrate. A high degree of parallelism between the two
near-planar interacting surfaces can be achieved because they are defined in a
single lithographic step. Apart from providing a compact platform for Casimir
force measurements, this scheme also opens the possibility of tailoring the
Casimir force using lithographically defined components of non-conventional
shapes
