Sensitivity of Surface Acoustic Wave Sensors Based LiNbO3 128° Y-X and at-Quartz to PM10 and PM2.5

Abstract

International audienceParticulate matter (PM) was estimated to cause around 7 million premature deaths worldwide per year according to<br&gtWorld Health organization [1]. These particles can cause diseases leading to premature death [2]. Over the last decade, the monitoring of PM became an important issue on a worldwide scale.The miniaturization of the existing bulky systems has also become necessary to reduce their cost. To address this need, a new miniaturized system for PM monitoring was previously developed in our team [3].It takes advantage of both a 3 Lpm cascade impactor and surface acoustic waves (SAW) sensors to respectively separate and measure particles. The present study aims to compare the sensitivity of two SAW devices. The first exploits Love waves on an ATcut Quartz substrate and the second is based on Rayleigh waves from a LiNbO3 Y-X 128° substrates. The latter presents a high electromechanical coupling factor that could be exploited for the self-cleaning of the device after the measurement. This could allow overcoming the fouling issue faced with impactors that wouldn’t be solved with quartz based sensors which suffer from an insufficient electromechanical coupling