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Wafer-scale van der Waals Epitaxy of III-Nitride Devices on h-BN-An Overview of 2D/3D Epitaxy, Device Fabrication, Mechanical Release-Transfer Methods and Device Performances
Authors
Rajat Gujrati
Soufiane Karrakchou
+8 more
Adama Mballo
Abdallah Ougazzaden
Gilles Patriarche
Jean-Paul Salvestrini
Ashutosh Srivastava
Suresh Sundaram
Paul Voss
Thi quynh phuong Vuong
Publication date
6 December 2021
Publisher
HAL CCSD
Abstract
Conférence invitéeInternational audienc
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HAL - Université de Franche-Comté
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oai:HAL:hal-03477832v1
Last time updated on 26/12/2021
HAL-CentraleSupelec
See this paper in CORE
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oai:HAL:hal-03477832v1
Last time updated on 27/12/2021