ZnO-GaAs acoustic biosensors: Focus on ZnO thin film characterization

Abstract

International audienceWe have been developing biosensors based on acoustic waves transduction for the detection of bacterial pathogens in complex biological media. The biosensor’s architecture consists of a GaAs membrane produced by clean room microfabrication techniques on which is deposited a thin layer of piezoelectric ZnO. In the present work, we focus on the structural, topographical and electrical characterization of ZnO layers deposited on GaAs substrates under different conditions. Keywords—piezoelectric zinc oxide thin film; X-ray diffraction; Raman spectroscopy; atomic force microscopy; impedance measurement