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On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality
Authors
R. Brunner
R. Durny
+7 more
C. Falcony
H. Gleskova
K. Gmucova
J. Mullerova
V. Nadazdy
L. Ortega
E. Pincik
Publication date
1 January 2002
Publisher
Sociedad Mexicana de Ciencia de Superficies Y Vacío A.C.
Abstract
A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device qualit
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University of Strathclyde Institutional Repository
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Last time updated on 01/08/2012
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Last time updated on 17/11/2016
