Ayela, Cedric

Dufour, I.

Heinrich, Stephen M.

Lemaire, E.

Poulin, P.

Thuau, D.

English

epublications@Marquette

Marquette Universitye-Publications@MarquetteCivil and Environmental Engineering FacultyResearch and PublicationsCivil and Environmental Engineering, Departmentof1-1-2014Development of Low Cost Piezoresistive OrganicCantilever ResonatorD. ThuauUniversité de BordeauxCedric AyelaUniversité de BordeauxE. LemaireUniversité de BordeauxStephen M. HeinrichMarquette University, stephen.heinrich@marquette.eduP. PoulinUniversité de BordeauxSee next page for additional authorsPublished version. Development of Low Cost Piezoresistive Organic Cantilever Resonator. Proceedings ofthe 11th International Workshop on Nanomechanical Sensing. Madrid, Spain. April 30-May 2, 2014.Poster Presentation.AuthorsD. Thuau, Cedric Ayela, E. Lemaire, Stephen M. Heinrich, P. Poulin, and I. DufourThis presentation is available at e-Publications@Marquette: https://epublications.marquette.edu/civengin_fac/120D. Thuau1, C. Ayela1, E. Lemaire1, S. Heinrich1,3, P. Poulin2, and I. Dufour11 Univ. Bordeaux, IMS, UMR5218, France; 2 CNRS, CRPP, UPR8641, France; 3 Marquette University, U.S.ADEVELOPMENT OF LOW COST PIEZORESISTIVE ORGANIC CANTILEVER RESONATORFluid1. Innovative fabrication process3. Possible applications2. Piezoresistive transduction(a)FIG 1a) Fabrication process flow of the U-shaped organic resonator, 1b) Optical image showing the flexibility ofthe bimorph nanocomposite + PET sheet after structures’ patterning, 1c) Schematic of the U-shaped cantileverand 1d) SEM images of the U-shaped organic MEMSConclusionFIG. 5 Mechanical properties of the PETbased U-shaped cantilever material as afunction of temperature measured with theorganic MEMS device and DMAFIG. 4. Temperature control and real time responses of the MEMS in static and dynamic mode20 40 60 80 100 120 140 16012345tan δE' (GPa)Temperature (°C) E' (DMA) E' (MEMS)0.000.050.100.150.20 tan δ (DMA) tan δ (MEMS)• Extremely quick and low cost two steps fabrication process (FIG. 1a).• Overall equipment cost estimation < 4,000 USD.• Consequently, it could be applied to a wide range of polymers leadingstraightforward to the development of organic electronics.3.1 Temperature sensor3.2 Mechanical properties of organic materialcharacterisation tool• The resonant frequencies (fr) have been measured to be 3602 and 3597 Hz foroptical and piezoresistive transduction respectively showing a goodagreement between the two transductionmethods (FIG. 2a).• Quality factors: 21< Q < 23• Good correlation with FEMsimulations.FIG. 2a) Comparison between SEMsimulations optical and piezoresistivedetection method for the 1st flexural mode ofresonance and 2b) Shift of the resonantfrequency and quality factor as a function oftemperature changes obtained fromelectrical measurement of thepiezoresistance; inset: Measured resonantfrequency versus temperature where thearrows show the direction of the shift of theresonant frequency with increasingtemperature• fr decreases with increasingtemperature (inset FIG. 2b).• Excellent linearity of theresponse (R=0.9975).• Sensitivity = -0.33%/°C.• LOD = 0.112°C.• Comparable to commercialPt100 temperature sensor.• The sensitivity of the thin film, U-shaped cantilever in static and dynamicmodes to temperature have been measured to be -863, -976 and -3300ppm/°C respectively (FIG. 3).• Quick response of the device in dynamic mode while a long delay in responseto temperature can be seen due to the viscoelastic properties of the materialin static mode (FIG. 4).• Integrated piezoresistive transduction in dynamic mode clearly appears to bethe methodwith optimal efficiency for temperature sensing.• Determine accurately the variationof storage modulus (E’) and tangentdelta (tan δ) as a function oftemperature of any organic materialused as substrate in the MEMSstructure.• Organic resonators have been fabricated using a quick, low-cost andenvironmentally friendly fabrication process. The developed fabricationmethod can be applied to a large panel of organic materials and can be seenas a considerable breakthrough for the development of low cost organicelectronics devices.• The quasi perfect correlation between FEM simulations, optical andpiezoresistive responses convinced us to be the first piezoresistivetransduction in organic MEMS resonators reported to date.• Moreover, the MEMS resonators have also been converted from their initialpurposes to determine the mechanical properties of organic materials. It hasbeen shown that mechanical properties such as E’and tangent delta of organicmaterial can be accurately extracted by recording the changes of resonantfrequency of the fabricatedMEMS.Introduction• We present the first piezoresistive transduced organic cantilevers in dynamicmode. The reported sensors have been fabricated using an innovative low-cost and environmentally friendly fabrication process.• Electromechanical characterization of the organic cantilevers as a function oftemperature has been performed validating this new concept.• Finally, the organic MEMS has been used to extract mechanical properties oforganic material.FIG. 3. Relative change of resistance or resonantfrequencies for thin film and U-shaped cantilever instatic and dynamic modeTable 1. Measured storage modulus of bimorph materials of CNT-SU/8 nanocompositedeposited on PET, PEN and paper substrates.• Excellent correlation of the E’ and tanδ measured by DMA and MEMSresonator (Table 1 and FIG 5).-56.4-56.2-56.0-55.83000 3200 3400 3600 3800 400050525456Magn. of displ. (nm)Gain (dB) Piezoresistive detection0100200300400 Optical detection  SimulationPhase (°)Phase (°)Frequency (Hz)-7507515020 25 30 35 40 45 50-10-8-6-4-20Quality factor, Q Increasing T°C Decreasing T°CShift of resonant frequency (%)Temperature (°C)1015202530 Quality Factor, Q3000 3500 4000Gain (dB)Phase (°)Frequency (Hz)a)b)0 5 10 15 20 25 30-10-8-6-4-20 ∆fr/fr Cantilever (dynamic mode)∆R/R or ∆f/f (%)∆T (°C) ∆R/R Cantilever (static mode)  ∆R/R Thin film0 5 10 15 20 25 3025303540  Temperature-∆R/R or -∆fr/fr (%)Temperature (°C)Time (min)01234  -∆fr/fr (dynamic mode)  -∆R/R (static mode)CNT-SU/8 on:E’ (GPa) E”(MPa) Tan δDMA MEMS DMA MEMS DMA MEMS PET 4.43 4.38 131 192 0.034 0.043PEN 2.90 2.81 290 256 0.069 0.088Paper 4.33 4.11 625 471 0.072 0.109

Development of Low Cost Piezoresistive Organic Cantilever Resonator

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Development of Low Cost Piezoresistive Organic Cantilever Resonator

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