Micrometer-scale Imprinting Process for Ceramic Sheet from Powder Compound Material

Abstract

AbstractA micro patterning process for thin ceramic sheets is proposed and developed in this paper. Thin sheets with a micro pattern have been expected to improve performance of solid oxide fuel cell. The authors focused on imprinting and powder metallurgy processes, and have developed the combined process, which has been named micro powder imprinting process. In this process, ceramic powder and polymer binder materials are mixed with pure water by milling machine. After drying out the water from the slurry, a thin compound sheet was obtained. Subsequently, the sheet was pressed using a fine patterned mold with heating to transcribe a micro pattern on the sheet. Finally, the imprinted sheet was heated for removing the polymer binder and for sintering. As further improvement of the process, a compound sheet was stacked on a pure polymer sheet during the imprint process to transcribe a micro pattern on the both sides of the sintered sample. The technique is useful for improved solid oxide fuel cell