Effect of nitrogen ion irradiation parameters on properties of nitrogen-containing carbon coatings prepared by pulsed vacuum arc deposition method

Abstract

Studies of the effect of nitrogen ion irradiation on the structure and properties of nitrogenated amorphous carbon coatings prepared on polished sitall and silicon substrates by the pulsed vacuum arc deposition method are presented. The techniques used in the investigations were electron energy loss spectroscopy, Raman spectroscopy, and atomic force microscop

    Similar works