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Temperature influence on the properties of thin Si₃N₄ films
Authors
P. V. Abakumov
I. Yu. Goncharov
+4 more
E. A. Piljuk
G. V. Rodriguez
S. V. Taran
V. S. Zakhvalinskii
Publication date
1 January 2015
Publisher
Abstract
Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si₃N₄ (obtained by RF magnetron sputtering
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Last time updated on 18/03/2020