The use of plasma-based deposition with ion implantation technology to produce superhard molybdenum-based coatings in a mixed (C₂H₂+N₂) atmosphere

Abstract

The influence of the pressure of a mixed gaseous atmosphere (80%C₂H₂+20%N₂) and the supply of a high-voltage negative potential in a pulsed form on the elemental and phase composition, structure and physico-mechanical characteristics of the vacuum-arc molybdenum-based coating