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一种碳化硅外延生长用加热器旋转装置
Authors
刘兴昉
孙国胜
+4 more
李家业
王雷
赵万顺
赵永梅
Publication date
2 January 2008
Publisher
Abstract
Abstract is not available.
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Knowledge Repository of SEMI,CAS
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oai:ir.semi.ac.cn:172111/4189
Last time updated on 15/03/2019
Knowledge Repository of SEMI,CAS
See this paper in CORE
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oai:ir.semi.ac.cn:172111/4327
Last time updated on 14/04/2017
Knowledge Repository of SEMI,CAS
See this paper in CORE
Go to the repository landing page
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oai:ir.semi.ac.cn:172111/3939
Last time updated on 15/03/2019