One of the transistors in an integrated circuit fabricated with graphene as the current controlling element, is investigated during its operation, using a chemical tool, XPS. Shifts in the binding energy of C1s are used to map out electrical potential variations, and compute sheet resistance of the graphene layer, as well as the contact resistances between the metal electrodes. Measured shifts depend on lateral positions probed, as well as on polarity and magnitude of the gate-voltage. This non-contact and chemically specific characterization can be pivotal in diagnoses. © 2016 Elsevier B.V

Aydogan P.

Balci O.

Kocabas C.

Suzer S.

Pinar Aydogan

Osman Balci

Coskun Kocabas

Sefik Suzer

Crossref

Organic Electronics

Monitoring the operation of a graphene transistor in an integrated circuit by XPS

One of the transistors in an integrated circuit fabricated with graphene as the current controlling element, is investigated during its operation, using a chemical tool, XPS. Shifts in the binding energy of C1s are used to map out electrical potential variations, and compute sheet resistance of the graphene layer, as well as the contact resistances between the metal electrodes. Measured shifts depend on lateral positions probed, as well as on polarity and magnitude of the gate-voltage. This non-contact and chemically specific characterization can be pivotal in diagnoses

Aydogan, P.

Balci, O.

Kocabas, C.

Süzer, Şefik

Bilkent University Institutional Repository

lable at ScienceDirectOrganic Electronics 37 (2016) 178e182Contents lists avaiOrganic Electronicsjournal homepage: www.elsevier .com/locate/orgelMonitoring the operation of a graphene transistor in an integratedcircuit by XPSPinar Aydogan a, Osman Balci b, Coskun Kocabas b, Sefik Suzer a, *a Department of Chemistry, Bilkent University, 06800, Ankara, Turkeyb Department of Physics, Bilkent University, 06800, Ankara, Turkeya r t i c l e i n f oArticle history:Received 22 March 2016Received in revised form20 June 2016Accepted 20 June 2016Available online 2 July 2016Keywords:GrapheneXPSContact resistanceIntegrated circuitTransistor* Corresponding author.E-mail address: suzer@fen.bilkent.edu.tr (S. Suzer)http://dx.doi.org/10.1016/j.orgel.2016.06.0271566-1199/© 2016 Elsevier B.V. All rights reserved.a b s t r a c tOne of the transistors in an integrated circuit fabricated with graphene as the current controllingelement, is investigated during its operation, using a chemical tool, XPS. Shifts in the binding energy ofC1s are used to map out electrical potential variations, and compute sheet resistance of the graphenelayer, as well as the contact resistances between the metal electrodes. Measured shifts depend on lateralpositions probed, as well as on polarity and magnitude of the gate-voltage. This non-contact andchemically specific characterization can be pivotal in diagnoses.© 2016 Elsevier B.V. All rights reserved.1. IntroductionAfter the discovery of the two-dimensional honeycomb struc-tured carbon about a decade ago, colossal academic activity hasbeen witnessed around a single or few-layers of graphene. [1,2]Even a greater activity has also been devoted to the technologicaldevelopments in terms of incorporation of graphene to the existingand well-developed infra-structure. [3e6] For characterization ofthe materials involving graphene, and more importantly, the de-vices fabricated from them, in addition to electrical, chemicalcharacterization is also needed. In that respect, most of thecommonly utilized optical techniques can only give indirect infor-mation about the electrical properties seeked. [7e14] Similarly,information derived using the conventional and powerful electronspectroscopic techniques, like Auger (AES), Ultra-Violet (UPS), andX-ray (XPS) photoelectron spectroscopies are also indirect, when itcomes to electrical properties. [15e19] However, under appropriateconditions, all of the electron spectroscopic techniques are capableof reflecting local electrical potentials developed, intentionally ornot, on the analyzed material or the device, since such potentialsare embedded into the measured kinetic energy of the ejected.electrons. Accordingly, difference between the obtained bindingenergy and the tabulated one gives the chemically-addressed localelectrical potential, which has been extensively utilized by ourgroup and others to harvest electrical information, difficult toobtain by other methods. [20e23] Using this methodology, we havepreviously reported on analyses of a device using graphene as theresistive sheet between the two electrodes, [20] and in anotherdevice where the graphene layer was operated in the back-gatedtransistor geometry. [21] The present work extends it to analyzeone of the transistors of the 64 elements of an IC-device, where C1sbinding energy position is measured with lateral resolution toprobe and map-out electrical properties of the transistor. Investi-gation of a single element out of the 64, is presented as “a proof ofprinciple”, since extension to the others are straightforward.2. Experimental detailsA picture of the device together with a survey XP spectrum of agraphene-only region is given in Fig. 1(a), where the dominatingO1s feature belongs to the SiO2 substrate, since probe depth isabout 10 nm, but the C1s peak has the peak position of graphene at284.7 eV. We synthesize single layer graphene on an ultra-smoothcopper foil (purchased from Mitsui mining and smelting company,LTD, B1-SBS) by using a chemical vapor deposition (CVD) systemconnected to a vacuum pump. We heat up copper foils to 1035 CFig. 1. (a) A survey XP spectrum recorded from the graphene-only part of one of the transistors. Areal intensity maps of the entire IC recorded in the snap-shot mode with 200 mmX-ray spot size and 200 mm steps of; (b) Au4f, and (c) C1s. (d) Picture of the IC inserted into the load-lock of the instrument.P. Aydogan et al. / Organic Electronics 37 (2016) 178e182 179under 100 sccm H2 flow. We, then, grow graphene by flowing 10sccm CH4 to the chamber for 1 min at that temperature. The partialpressures of the H2 and CH4 are 1.5 Torr and 3 Torr, respectively,during the growth process. We cool down the chamber at a rate of10 C/s to room temperature, while 100 sccm H2 flows. To transfergraphene on SiO2 substrates, we first coat the copper foil with theShipley 1806 resist and dry them by annealing overnight at 80 C.Then, we etch the graphene grown copper in FeCl3 aqueous solu-tion. After washing and drying the resist-graphene stack, we put iton SiO2 substrate and heat the resist-graphene-SiO2 stack at 70 Cfor 2 min and at 120 C for 20 s. This process ensures that the resist-graphene stack perfectly sticks to the SiO2 surface. We dissolve thedry resist with acetone and finally obtain a graphene transferred onSiO2 substrate. To fabricate back-gated graphene transistors on Siþ/SiO2 substrate, we evaporate 50 nm Au for source and drain con-tacts to the graphene. After isolating each transistor channel with areactive ion etching (RIE) process, we evaporate 5 nm-Ti andFig. 2. Electrical characterization of graphene transistors. (a) Schematic drawing of a back-gaas a function of back gate voltage. Red line shows the drain current with an applied bias of gate voltage. (c) Output curves of one of the transistor as a function of bias with varying gateis referred to the web version of this article.)100 nm-Au to extend the area of source and drain contacts.Mechanically strong metal contacts are required for wire-bonding. The fabricated transistors used in this work have0.5 mm channel width and 1.0 mm channel length. Schematicdrawing of the fabricated transistors is shown in Fig. 2(a). Tomeasure the electrical performance of the fabricated transistors, weuse HP-4153 probe station.3. Results and discussionWe apply 1 V bias between the source and drain electrodesand measure the current as a function of the gate voltage, shown inFig. 2(b). The result of the electrical-only measurements indicatesthe Dirac point to be near 0 V, and other Current-Voltage charac-teristics are depicted in Fig. 2(c). The calculated field effect mobilityof the device used in this study is around 820 and 600 cm2/V forholes and electrons, respectively (see the Supplementaryted graphene transistor is shown. (b) Transfer curve of one of the graphene transistors1 V and blue line shows the corresponding resistance of graphene as a function of thevoltages.(For interpretation of the references to colour in this figure legend, the readerFig. 3. XPS data of one of the transistors recorded with 50 mm X-ray spot size and 50 mm steps of; (a) Areal intensity maps of C1s, and (c) Au4f peaks. A schematic representation ofzooming to a single transistor connected in the source-drain configuration while the gate is grounded is displayed in (c). Spectra recorded in the line-scan mode are shown in (d)and (f), while the binding energy positions of the C1s and Au4f7/2 are displayed in (e).P. Aydogan et al. / Organic Electronics 37 (2016) 178e182180Information (SI) section and Fig. S1), where the mobility is calcu-lated using the maximum transconductance of the device. Once theintegrity of the transistors has been established by electrical mea-surements, further contacts are attached for XPS characterization, apicture of which was given in Fig. 1. The entire IC is inserted into theanalysis chamber of the Thermo Fisher K-Alpha X-ray photoelec-tron spectrometer, which uses monochromatic AlKa(hy ¼ 1486.6 eV) as the excitation source. Some of the measure-ments are done only in the source-drain, while the other in thesource-drain-gate geometry. Therefore, the instrument is modifiedto provide two external voltage biases, where one is used as thesource and the other as the gate, while the drain is grounded. Usingthe intensity of the O1s peak of the substrate and the C1s of gra-phene from the survey spectrum of the graphene-only regionshown in Fig. 1, it is possible to estimate the thickness of the gra-phene layer as ~1.1 nm. Computational details are given in the SIsection.In Fig. 1, areal intensity (computed area) maps of the entire ICrecorded in the snap-shot mode with 200 mm X-ray spot size and200 mm steps are also shown for the Au4f and C1s peaks. Since theprobe depth of XPS is about 10 nm, gold electrodes and also thegold wire connections are easily identified, while carbon is every-where. It is also possible to record the data with smaller spot size(50 mm) of and steps (50 mm), and zooming to only one of thetransistors, as shown in Fig. 3, where the intensity of the C1s andAu4f are shown as areal maps (a) and (c). In the same Figure thepeak positions are shown as regular scanned spectra recorded inthe line-scan mode with inherently better precision in (d) and (f),while a þ3 V bias is applied to the source electrode, and both thedrain and the gate are grounded.The extracted binding energies are shown in Fig. 3(e) for bothpeaks as a function of lateral position, and the actual spectra arereproduced in the SI section as Fig. S3. The binding energy of theAu4f7/2 peak, which is commonly used as a reference, is 84.00 eV,and it is exactly what is measured at the grounded electrode.However, it is measured as 86.94 eV at the source, yielding a dif-ference of 2.94 eV which reflects faithfully the applied voltage biasof þ3 V, within the precision of our measurements. The measureddifference in the position of the C1s peak across the electrodes isless precise and is 2.6 eV, i.e. 0.3 eV less. This small but significantdifference can be attributed to the contact resistance(s) betweenthe graphene and the gold electrodes, since application of 3 Vcauses a sizable current of ~2.6 mA, passing between the metalelectrodes, consistent with the geometry of the graphene layer. Thecontact resistance, especially in devices with smaller dimensions isknown to adversely affect the performance. [24e30] Therefore,location, as well as information related with its chemical nature ishighly desirable. Besides the conventional electrical-only mea-surements, Kelvin probe force microscopy is the only other toolwhich can locate and quantify contact resistance(s), [27] but againit, too, falls short when it comes to chemical specificity. Hence useof XPS for this purpose is very unique.In order to harvest the effect of gating, instead of applying avoltage bias, a current bias needs to be imposed, since the gate isthe current controlling element of the circuit, which requires twobiases. That is what is implemented for the data shown in Fig. 4,where a constant voltage bias of þ3 V is applied to the sourcethrough a precision 1 kU series resistor, and a second variablevoltage bias is applied to the gate, while grounding the drain, asschematically shown in the same figure. Here again, the voltagedrop across the gold electrodes, as well as the potential variationsthrough the graphene sheet, under three different gate voltages, aremeasured through the positions of the Au4f7/2 and C1s peaks,respectively, which are given in Table 1. Using these data togetherwith a simple equivalent circuit model, both the sheet as well as thecontact resistances can be obtained for all 4 different operationalconditions of the transistor, in an all non-invasive fashion (detailsare given in the SI section). The values obtained are consistent withTable 1Measured binding energies of Au4f7/2 and C1s peaks for the four different operational conditions of the graphene transistor. Computed electrical parameters are also given.Details of which are given in the SI section.Gate (V) B.E. (Au4f7/2) (eV) B. E (C1s) (eV) Sheet resistance (U) IR drop (eV) Contact resistance (U)S D D S D DNo gating (þ3 V Bias) e 86.94 84.00 2.94 287.5 284.9 2.6 1020 (1.2 kU/sq) 0.34 130 (52 kUmm)þ3 V over 1 kU Series Resistor 0 85.57 84.00 1.57 286.2 284.8 1.4 1020 (1.2 kU/sq) 0.17 120 (48 kUmm)þ21 86.12 84.00 1.12 285.8 284.8 1.0 550 (0.6 kU/sq) 0.12 65 (26 kUmm)21 86.75 84.00 1.82 286.5 284.8 1.7 1550 (1.6 kU/sq) 0.12 65 (26 kUmm)Fig. 4. XP spectrum of C1s recorded in the normal line-scan mode of the transistor under þ3 V bias applied through a 1 kU series resistor, while the transistor is gated from thebottomwith; (a) þ21 V, (b) 0 V, and (c) 21 V. (d). A schematic representation of the electrical connections. (e), (f), and (g) are the measured binding energy positions of the C1s andAu4f7/2 for the corresponding data in (a), (b), and (c).P. Aydogan et al. / Organic Electronics 37 (2016) 178e182 181our previous electrical-only measurements, [29] and also with re-ported ones. It must also be stressed that extracted values of thetransistor using XPS, as given in Table 1, differs from those depictedin Fig. 2 using electrical means. Such a difference is common since,the XPS measurements are performed in vacuum, in the absence ofair and humidity, whereas the electrical measurements are carriedout in air ambient, and the position of the Dirac point can deviatesignificantly between the two diverse conditions.4. ConclusionsIn summary, through application of electrical bias, XPS is shownto be able to extract electrical parameters of an isolated graphene-based transistor of a 64-element IC during its operation in achemically specific and non-contact fashion.AcknowledgmentsThis work is supported by the 2Dfun Project in the FLAG-ERAJoint Translational Call, 2015 within the Graphene Flagship andalso by TUBITAK, the Scientific and Technological Research Councilof Turkey, through the Grant No. 215Z534.Appendix A. Supplementary dataSupplementary data related to this article can be found at http://dx.doi.org/10.1016/j.orgel.2016.06.027References[1] K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, M.I. Katsnelson,I.V. Grigorieva, et al., Two-dimensional gas of massless Dirac fermions ingraphene, Nature 438 (2005) 197e200.[2] A.K. Geim, K.S. Novoselov, The rise of graphene, Nat. Mater. 6 (2007) 183e191.P. Aydogan et al. / Organic Electronics 37 (2016) 178e182182[3] S. Bae, H. Kim, Y. Lee, X. Xu, J.S. 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Monitoring the operation of a graphene transistor in an integrated circuit by XPS

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