The design and operation of semiconductor
cleanrooms play an important role in the
advancement of many of today's technology
needs as the use of microelectronic products
become engrained in our society. Cleanroom
construction has averaged double-digit growth
through the 1990's and into early 2000.
Advances in factory technology have placed
demands on all aspects of cleanroom design,
construction, materials, and so on. Much of this
growth has been centered in hot climate of the
sunbelt.
Energy efficiency has not been a high priority for
the semiconductor industry in the past, since
costs related to this issue have historically
represented a relatively small percentage of
overall operating costs. From a Semiconductor
Industry website in October 2001: “Slashing
energy consumption has become an
unquestioned semiconductor industry goal.”
Semiconductor Industry Association's
International Technology Roadmap for
Semiconductors has energy goals on the
roadmap for power per unit of silicon processed;
the World Semiconductor Council has policies
for energy reduction, numerous publications,
workshops, and seminars touting need for
energy reduction. There is no longer any
question that cutting energy usage makes good
business sense, especially given rate increases
being experienced in many parts of the country.
This paper will present some of the methods
being used by a multi-national semiconductor
company to change the way they design and
build cleanrooms with a focus on resource
conservation, energy conservation methods, and
cost of ownership. Various clean air and energy
management scenarios will be compared with
their potential for energy savings
