2000-2001 > Academic research: refereed > Publication in refereed journalVersion of RecordPublishe

Cheung, CF

Lee, WB

Li, JG

2000-2001 > Academic research: refereed > Publication in refereed journalVersion of RecordPublishedVoR allowe

PolyU Institutional Repository

????: 1004- 132Ⅹ ( 2000) 08- 0845- 04?????????????????　??李荣彬　张志辉　李建广　　　　??:描述并建立了仿真超精密加工的三维表面形貌模型。三维表面形貌模型由切削参数、刀具几何形状及刀具与工件的相对运动来表征 ,通过将预测的表面粗糙度轮廓线性映射到网格面元上来生成已加工表面的形貌。实际的加工和测量实验表明 ,仿真的三维表面形貌和由激光干涉形貌仪测量得到的三维形貌具有很好的相似性。 该模型可用来确定如刀具切削运动的迹线、表面波度等表面特征。???: ?? ;?? ;???? ;??????????: T H161. 1　　　?????: A????: 2000— 05— 30????:?????????????????????　　????、??????????????????? ,??????????????????。?? ,?????????????????。?????????????????? ,???????????????、?? ,????????????????????????????。????????????????????? ,???????????????????????? [1 ]。????????????????????????? [2, 3 ] ,????????????????????????????? ,?????????????????????????????? [4 ] ,?? ,?????????????????? ,??????????????????????。1　三维表面形貌模型???????????????????????、???????—???????? [5, 6 ]。 Takasu? [7 ]????? ,?????????????????????????? ,???????????????????????????????????。????? ,?????????? ,?????????????? ,??—?????????????????、???????? ;????????????? ,????????????????? ;???????? ,?????????????? ;??????????????????????????? ,???????? ,???????????????? ,?? ,?????????? 0. 015(??? 30 nm /???? 2000 nm ) ,??????? ,????????。?????????? ,????????????????????????????????????? (?? 1)。????????? 1　?????????????????????????????????????????? ,?????????????????????????????????。???????? ,????????????????·845·??????????????——???　???　????????? ,???????? ,??????????、????? [7 ]? ,???????????????????????。??—??????????? f z ????? n????60f zn= Δ+ X ( 1)?? ,Δ????? ;X??? ,? - 0. 5≤X≤ 0. 5。???????????h????h= 2πX ( 2)???????N p = 2π /Δθ ( 3)?? ,Δθ??????? ;?? ??????????????。?????????????????????????。????? ,?????????? Zc ( t )????????????????? ,????Zc (t ) = A sin( 2πf z t - h) ( 4)?? , A???— ?????????? ,μm; t????? , s。???????????????? ,?????k(k= Δθ/Δt ,Δt????? )?????N (N = R0 /s , s????? )????? ,?????????N t =2πNkΔt ( 5)???????????????????( 4)?? ( 5)??:Zc ( j ) = Asin(2πf z jΔθk - h)　 j = 0, 1, 2,… , N t ( 6)??????????? (?? 1) ,????????????????? ,??????????? — ????????????????。? x - y????????????????????R j = R0 - jΔrθj = jΔθ ( 7)?? x - y?????????xc ( j ) = (R0 - jΔr ) sin( jΔθ)yc ( j ) = (R0 - jΔr ) cos( jΔθ) ( 8)? ( 7)?? ( 8)??????????????? ,??? k????????????????? x yz???? Rk - Zk????????? , Rk??? k???????? ,k = 0, 1, 2,… , N p。?? k?????? ,????? Rk - Zk?????????? ( 6)?? ( 7)?? ,????:θt ( i ,k ) = kΔθ+ 2π( i - 1)　　 i = 1, 2,… , N ( 9)rt (i , k ) = R0 - [k + (i - 1)N p ]ΔR ( 10)Zt (i ,k ) = Asin{Cp [k + ( i - 1)N p ] - h} ( 11)?? , Cp = 2πf zΔθ/k。? i??? i+ 1????????????k??????? 1????????? ,?????:Zk , i ( rk , i ) = Zt ( i ,k ) +[rk , i - (i - 1)s ]22R　　　 i = 1, 2,… , N - 1 ( 12)Zk , i+ 1 (rk , i+ 1 ) = Zt (i + 1,k ) +( rk , i+ 1 - is)22R( 13)?? , (rk , i , Zk , i )?? i??????? k????????? ; R???????。?? i?? i+ 1??????? k????????? Tk , i , i+ 1 (rk , i, i+ 1 , Hk , i, i+ 1 )?? Zk, i =Zk, i+ 1 , rk , i = rk, i+ 1 ,?rk , i , i+ 1 =R [Zt (i + 1,k ) - Zt ( i ,k ) ] + (i -12) s2s( 14)? i??? i+ 1??????? k?????????????? ( 13)?? ( 14)??:Hk , i , i+ 1 = Zt ( i + 1,k ) +(rk , i , i+ 1 - is)22R=Zt ( i+ 1, k ) +{2R [Zt (i + 1, k ) - Zt (i , k ) ] - s2} 28Rs2( 15)???????????????????????????? ,?????? k??????????????????????????????。???????? ,? k= 0, 1, 2… ,N p ,??? ( 9) ～ ? ( 15) ,???????? {rk ,Zk ,kΔθ}??? Rk - Zk ???????????? ,?????????????????????? (?? 1):X I =[Lx2 + rk sin(kΔθ) ]Lxm x ( 16)YI =[L y2+ rk co s(kΔθ) ]Lymy ( 17)ZI = Zk ( 18)?? ,mx、m y??? x、 y?????? ; Lx、 L y??????????、??。?? 2?? ,????????? 4???????? ,??????????????????。?????? (X IA , YIA , ZIA )? 4????? ,????? (X IB ,Y IB , ZIB )? 3??????? ,?????? (X IC ,Y IC , ZIC )·846·??????? 11?? 8? 2000? 8?? 2　????????????? 2???????。??????????????????????? ,????????????????????。????????? ,????????????????????? Rt??? ,??????????????????????????。???? {Zs }?????????????? N s、???????? Zs ,??????????R^ t = max {Zs } - min{Zs } , Zs ∈ {Zs } ( 19)Zs = (1N s∑Nsis= 1Zs , is) ( 20)?? , Zs, i????? is???????????。2　实验验证?? ?? ? CNC ??? ?? ( Taylo rHobson Pneumo??? Nano fo rm 300)???????? ,????????? ,?????12. 7 mm ,?????? ,??????????? ? ? ? ?: Bal. , Al: 0. 24, Fe: 0. 20, Zn: 0. 4,Pb: 0. 12。? WYKO TO PO - 3D????????????????????????????。????????????????????? ,??????????????????????。?? ,?????????????:N p = 360,Δθ= 0. 0175 rad,Lx = L y = 0. 25 mm,mx = my = s /5,???????? 1。? 1　 ????????( r /min)????( mm /min)????(μm)????(°)??????( mm)500 15 2 0 1. 554　　?? — ?????????????????????????????????? ,?????????????????????0. 015μm,??? 45. 0 Hz。3　结果和讨论? 3???????? — ???????????? ,?? ( 8) ～ ? ( 10)?? ,??? x -y???????????????????? ,??????? (? z??? )?????? ,????????????? 4?????。? 3　 ??????? 4　 ????????? ( 11) ～ ? ( 15) ,????????????? ,??????????????????? (?? 5) ,??????????????? 6。??????? ,???????????????????????????。????????????? ,???????、???????????????????????。?????????????? Rt ????92. 6 nm ,????? 94. 4 nm ,????。????????????????????????·847·??????????????——???　???　????? ,? 7?????????????????。? 5　?????????? 6　?????????? 7　????????????????4　结论?????????????????????????? ,????????????、????、?? — ????????????? ,???????????????????。???? ,????????????????????????。????????????????????????。????:[ 1]　 Tai T P, Yang Y C, Hwong Y C et al. A New Con-cept o f Cutting Ma rks Fo rmation in Metal CuttingV ibration. Pro ceeding s of 20th M TDR, 1980: 449～456[ 2]　 Sato H, O- ho ri M . Cha racteristics o f Tw o Dimen-siona l Sur face Roughness - Taking Self - ExcitedChat ter Ma rks as Objectiv e. Annals o f the CIRP,1981, 30( 1): 481～ 486[ 3 ]　 Bispink T. Pe rfo rmance Analysis o f Feed - Driv eSy stems in Diamond Turning by Mchining SpecifiedTest Samples. Anna ls of the CIRP, 1992, 41( 1): 601～ 604[ 4]　 Byne G. New Approach to the Th eo r etical Analysiso f Sur face Gener ation Mechanisms in Machining.Annals o f the CIRP, 1992, 41( 1): 67～ 70[ 5]　 Sata T , Li M , Takata S et al. Analy sis of SurfaceRough ness Genera tion in Turning Opera tion and itsApplica tions. Annals o f the CIRP, 1985, 34( 1): 473～ 476[ 6]　 Cheung C F, Lee W B. A Theor etical and Experi-mental Investig ation o f Sur fa ce Roughness Forma-tion in Ultra - precision Diamond Turning . Int. J.Mach. Tools and Manuf. , 2000, 40( 7): 979～ 1002[ 7 ]　 Takasu S, Masuda M , Nishiguchi T. Influence ofStudy V ibr ation w ith Sma ll Am plitude Upon Sur-face Roughness in Diamond Machining. Annals ofth e CIRP, 1985, 34( 1): 463～ 467(??　??? )????:李荣彬 ,? , 1951??。 ???????????????、???。 ????????????、????、???????????。???? 4? ,???? 150??。张志辉 ,?????????????。李建广 ,???????????????。中国机械工程学会推荐张曙、张武城为“全国优秀科技工作者”候选人　??????????? [2000 ]101?《??????、?? 2000?“?????????”?????》?? ,???????????????? ,??“?????????”????????? ,??????????????????。????????? ,???????? ,????、??? 2???????????????“?????????”?????。(???? )·848·??????? 11?? 8? 2000? 8?ISSN 1004- 132XCHINA M ECHAN ICAL ENGIN EERING( Transactions of CM ES)V ol. 11, No. 8, Aug . , 2000Monthly( Serial No. 80)Edited and Published by: CHIN A MECHAN ICALENGIN EERIN G M agazine OfficeAdd: No. 14 Shipailing Wuchang Wuhan ChinaDistributer: China International Book TradingCorporation ( P. O. box 399, Bei jing )Code: 4163- MOMAIN TOPICS,　ABSTRACTS　&　KEY WORDSDevelopment of Ultra- Precision Mach ining Technologyand Our Strategy　 L I Shengyi( National Univ er sity of De-fense Technolog y , Chang sha, China ) DAI Yifan　 p 841-844Abstract: This pape r describes ultra- precision ma-chining technolog y , its applica tion backg r ound and its re-cent development. The trend of modula riza tion andcheapenation is described in detail fr om th e point o f viewo f w idespread application o f this technolog y. Some newideas about modula r component, a ctua ting system, mea-surement technolog y, and environment contr ol ar e po int-ed out in o rder to promo te the technolog y.Key words: ultr a - precision machining　 machineto ols　 ultra - precision nume rical contro l　 e rro r mea-surementPredict ion of 3-D Surface Topography in Ultra- precisionMachining　W. B. Lee　 ( The Hong Kong Po ly tech nic U-niv e rsity , Hong Kong , China ) C. F. Chueng　 J. G. Li　p 845-848Abstract: This paper describes a model for the sim u-la tion of 3-D sur face topog raphy in ultra- precision dia-mond turning. In the model, the kinema tics o f the diamondturning pr ocess is cha racte ri zed by machining param eters,the to o l g eom etry as w ell as th e relativ e motion betw eenthe to ol and th e wo rkpiece. The topog raph y o f the ma-chined surface is g enera ted by a linea r mapping o f th e pre-dicted sur face r oughness pro files on the surface elementso f a cro ss la ttice. Cutting experiments w er e ca r ried outand good cor relation is found betw een the sim ulated to-pog raphy and the thr ee - dimensional topog raphy ob-tained from the optical inter ferometer. The model can a lsohelp to identify sur face fea tures like traces o f too l mo tionand sur face w aviness.Key words: modelling　 simula tion　 surface topog ra-phy　 ult ra- precision diamond turningDevelopment of Ultra- precision Opt ical Aspheric Grind-ing System　 CHEN Mingjun( Ha rbin Institute o f Tech no l-ogy , Harbin, China ) DONG Shen ZHANG Feihup 849-851Abstract: Fo r g rinding an aspheric par t with highprecision and high quality , in the paper, firstly the influ-ence facto rs on surface roughness and pro files accuracy ofmachined surfaces w as analy zed theo re tically. After-w ards, autho r s designed and built the ultra- precision as-pheric g rinding sy stem. Th e w o rkpiece spindle , trav erseguide, longitudinal guide and spindle o f the grindingwheel w ere o f g aseous fo rm. Ro tating e rro r of the w o rk-piece spindle wa s in 0. 05μm, the highest speed o f theg rinde r wa s o f 80 000 r /min and the ro tating err or was in0. 1μm, the resolution of linea r displacement of th e tr a-verse and longitudina l guide w as 4. 9nm. M ic ro- adjus-tiv e er ro r o f the micro- adjustiv e mechanism w as in 0. 1μm. A t last, the g rinding system w as used in ultra -g rinding asph eric par t. Grinding r esult w as sh ow n thatpr ofiles er ro r w as in 0. 4μm and th e sur face roughnessv alue was less than 0. 01μm.Key words: ultra - precision g rinding　 optical as-pheric sur face　 cente r high micro- adjustiv e mechanismRobot Precision Machining System with Ultrasonic Pol-ish ing for Free- form Surfaces　 ZHAN Jianming ( JilinUniv e rsity , Changchun, China) ZHAO Ji　 ZHU Peix ing　p 852-854Abstract: This paper presents th e rationality that therobo t is used in free- fo rm surface precision machining ,introduces the str uctur e and the oper ating principle of therobo t elastic ultrasonic po lishing system and establishesthe contro l model fo r robot in free- fo rm surface machin-ing . Furthermore, the feasibility of this sy stem is v er ti-fied by th e experiments.Key words: free- form surface　 robo t　 ult rasonicmachining　 elastic polishingThe Research of Ef fects of Brittle Single CrystalMaterial’ s An isotropy on the Diamond Turned SurfaceQuality　 ZHAO Qing liang ( Ha rbin Institute of Tech no lo-gy , Harbin, China ) DONG Shen　 ZHAO Yi　 p 855-860Abstract: Ba sed on the anisotr opy o f g ranula r struc-ture, the r ea sonable c riterion w as g iv en to understand thegenera tion of the prio r cleavage o r slip fo r each cleavagesy stem o r slip sy stem. The phenomenon tha t the rough-ness o f the diamond turned sing le cr ystal ma terial 's sur-face distributes in sca llops is explained, and a turningmethod is presented to eliminate th e scallops distribution.·1·M AIN TO PICS,　 ABSTRACT S　&　 KEY WO RDS

Prediction of 3-d surface topography in ultra-precision machining

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