The paper presents the methods of creation and research results of matrices of electronic elements on field cold cathodes with given geometric and electrophysical parameters. The developed controlled matrices are small-sized, highly efficient sources of electron beams with low energy consumption for microelectronic devices, such as microdisplays. Field emission elements with nanostructured cathodes in the triode and diode configurations are implemented based on original structural and technological methods for the electrochemical formation of vertically oriented arrays of metal oxide niobium nanostructures, compatible with the latest nanotechnologies used in the manufacture of promising optoelectronic and nanoelectronic products
