Multicomponent metal oxide compounds of the composition Sn–Mo–O, Sn–Ni–Mo–O and Sn–Bi–Mo–O
were formed by successive ionic layer adsorption and reaction (SILAR) method deposition into anodic
alumina matrixes. The growth mechanism of the Sn–Mo–O-containing films in the porous anodic alu-
mina was investigated. It was found that the degree of pore filling, specific thickness and surface mor-
phology of the deposited layer depend not only on the number of cycle’s treatment, but also on the
composition of the used solutions. The morphology of Sn–Mo–O and Sn–Ni–Mo–O surfaces had granular
structures, while Sn–Bi–Mo–O layer had flake-like structure. The differences in microstructure and depo-
sition of the layers on the surface of the matrixes can be explained by the insufficient activation of anodic
alumina pores before deposition. The investigations of the formed layers composition by the electron-
probe X-ray spectral microanalysis showed that the ratio of tin to molybdenum in tin-molybdenum con-
taining oxides changes. The Sn/Mo atomic ratio for Sn–Mo–O layer is 1.29/2.72; for Sn–Ni–Mo–O layer is
5.83/4.85; for Sn–Bi–Mo–O layer is 0.60/0.87. The using of SILAR method allows forming multicomponent
films in the anodic alumina matrixes, which have great potential to applicate in high-sensitivity gas sensors
