Metrology data modeling and data handling:capturing a domain model of ASML metrology in a software framework

Abstract

During recent years, ASML metrology functionality has grown intensely. However, the software design principles (such as single responsibility, interface segregation, or open/closed principle) have sometimes been left unattended in favor of time to market. This hampers the implementation of functional design. This report describes the design and im-plementation of the metrology domain model. The domain model expresses core metrology entities, their attributes, behavior, and relationships. The Onion architecture model and domain-driven design (DDD) characterize the approach towards building the domain mod-el. Since this approach relies heavily on the dependency injection principle, the model be-comes a technology-independent core of the software implementation. The results of the project show how the metrology software can look in the future. With the isolated and ex-plicit domain model, software maintainability increases. Moreover, the domain model es-tablishes a ubiquitous language for different engineers, hence bringing the functional design closer to the software design