Theoretical and experimental nonlinear dynamics of a clamped-clamped beam MEMS resonator

Abstract

Microelectromechanical resonators feature nonlineardynamic responses. A first-principles based modeling approach is proposed for a clamped-clamped beam resonator. Starting from the partial differential equation for the beam including geometric and electrostatic nonlinear effects, a reduced-order model is derived. The model captures the experimentally observed nonlinear dynamic behaviour of the resonator and allows for fast simulation and prediction of its response