Application of optimally-shaped phononic crystals to reduce anchor losses of MEMS resonators

Abstract

This work is focused on the application of Phononic Crystals to reduce anchor losses of MEMS contour mode resonators. Anchor losses dominates the losses in these type of released resonators at low frequency and at low temperature. The use of phononic crystals, intended as finite-periodic distribution of holes in the anchor, is fully compatible with fabrication processes and moreover it is easy to implement. The numerical results obtained in this work show how the use of these crystals can significantly reduce the anchor losses: without the use of the crystal the Q-factor related to only anchor losses is 344, with the use of the crystal it can reach up to 105900