Badri, Abdellatef E.

Sinha, Jyoti K.

The use of the MEMS (Micro-Electro Mechanical System) concept for manufacturing accelerometers is relatively new technology which requires rigorous performance tests before actual use in the field. Number of laboratory based experiments suggests that the measured signals by the MEMS accelerometers generally show deviation when compared with the conventional accelerometer. Hence, a simple Finite Element (FE) model of a MEMS accelerometer has been constructed and the modal analysis has been carried out. The cantilever beam mode of finger used in MEMS capacitive type accelerometers observed in the modal analysis highlights the possibility of errors in measurement. Hence, few modifications in finger design have been suggested to improve the performance of the MEMS Accelerometer

Dynamics of mems accelerometer

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