Microelectromechanical systems (MEMS) have great potential in realizing chip-scale integrated devices for energy-efficient analog spectrum processing. This thesis presents the development of a new class of MEMS resonators and filters integrated with CMOS readout circuits for RF front-ends and integrated timing applications. Circuit-level innovations coupled with new device designs allowed for realizing integrated systems with improved performance compared to standalone devices reported in the literature.
The thesis is comprised of two major parts. The first part of the thesis is focused on developing integrated MEMS timing devices. Fused silica is explored as a new structural material for fabricating high-Q vibrating micromechanical resonators. A piezoelectric-on-silica MEMS resonator is demonstrated with a high Q of more than 20,000 and good electromechanical coupling. A low phase noise CMOS reference oscillator is implemented using the MEMS resonator as a mechanical frequency reference. Temperature-stable operation of the MEMS oscillator is realized by ovenizing the platform using an integrated heater. In an alternative scheme, the intrinsic temperature sensitivity of MEMS resonators is utilized for temperature sensing, and active compensation for MEMS oscillators is realized by oven-control using a phase-locked loop (PLL). CMOS circuits are implemented for realizing the PLL-based low-power oven-control system. The active compensation technique realizes a MEMS oscillator with an overall frequency drift within +/- 4 ppm across -40 to 70 °C, without the need for calibration. The CMOS PLL circuits for oven-control is demonstrated with near-zero phase noise invasion on the MEMS oscillators. The properties of PLL-based compensation for realizing ultra-stable MEMS frequency references are studied.
In the second part of the thesis, RF MEMS devices, including tunable capacitors, high-Q inductors, and ohmic switches, are fabricated using a surface micromachined integrated passive device (IPD) process. Using this process, an integrated ultra-wideband (UWB) filter has been demonstrated, showing low loss and a small form factor. To further address the issue of narrow in-band interferences in UWB communication, a tunable MEMS bandstop filter is integrated with the bandpass filter with more than an octave frequency tuning range. The bandstop filter can be optionally switched off by employing MEMS ohmic switches co-integrated on the same chip.PhDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/109069/1/zzwu_1.pd
