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一种多孔氧化物半导体纳米薄膜制备方法
Authors
刘欢
李涛涛
+4 more
杨利青
王浩静
王红飞
胡炜杰
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Publisher
Abstract
本发明涉及一种多孔氧化物半导体纳米薄膜的制备方法。其技术方案是,使用共溅射技术,采用氧化物半导体靶材(或相应金属靶材)和造孔剂靶材,在Ar或者Ar、O2混合气氛下,在基底表面同时或者交替沉积薄膜,预制成具有氧化物/造孔剂两种物相的复合纳米薄膜。预制的复合薄膜在经过水洗后,造孔剂被溶解,得到多孔的纳米薄膜。最后将薄膜烘干,进行退火处理,能得到结晶性好、高取向、高孔隙度的纳米薄膜
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Last time updated on 29/11/2016