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用于金属化学气相沉积设备反应室的进气喷淋头
Authors
冉军学
曾一平
+5 more
李晋闽
梁勇
王军喜
胡国新
胡强
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Publisher
Abstract
一种用于金属化学气相沉积设备反应室的进气喷淋头,包括:一混气室,该混气室为一桶状,在混气室的上面或侧面连通有多个进气通道;一冷却匀气喷头,固接于混气室的下面。其中冷却匀气喷头包括:一上盖板、一下盖板和侧壁,该上盖板、一下盖板和侧壁构成密封的空间,该上盖板和下盖板之间贯通有多个进气通道,该进气通道的周围及上盖板和下盖板之间为冷却通道
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Last time updated on 29/11/2016