CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
GaN的声表面波特性研究
Authors
严莉
何世堂
+13 more
刘祥林
朱勤生
李昱峰
李红浪
王占国
王晓晖
袁海荣
陆大成
陆沅
陈振
陈晓阳
韩培德
黎大兵
Publication date
1 January 2003
Publisher
Abstract
采用金属有机物化学气相外延方法在(0001)面蓝宝石上生长了高质量、高阻的未掺杂(0001)面GaN薄膜。为精确测量GaN薄膜材料的声表面波特性,在GaN薄膜表面上沉积了金属叉指换能器,叉指换能器采用等叉指结构,叉指的数目为40对,叉指间距为15μm。采用脉冲法测量了声表面波在自由表面和金属表面上的速度,并通过计算得到了机电耦合系数(κ^2)。所测量的声表面波速度(ν)为5667m/s,机电耦合系数(κ^2)为1.9%
Similar works
Full text
Available Versions
Knowledge Repository of SEMI,CAS
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:ir.semi.ac.cn:172111/17727
Last time updated on 29/11/2016