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反射率小于10~(-4)的1310nm光电子器件增透膜技术的研究
Authors
王仲明
茅冬生
谭满清
Publication date
1 January 1999
Publisher
Abstract
阐述了电子回旋共振等离子体化学气相沉积法淀积半导体器件端面光学膜的优良特性。介绍了淀积反射率小于10~(-4)的1310nm半导体激光器端面增透膜技术,并对这种技术的优点和两端淀积增透膜后的激光器特性进行了讨论
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Last time updated on 29/11/2016