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偏振差分反射谱(RDS)测试系统
Authors
万寿科
王占国
陈涌海
Publication date
1 January 2000
Publisher
Abstract
利用RDS测试系统,可以在近垂直入射条件下,测量出样品的反射系数在样品平面内两个互相垂直的方向上的细微差异,即所谓平面内光学各向异性。它对研究半导体材料及其量子阱超晶格等低维结构中的平面内光学各向同性、半导体表面重构和对外延生长过程中的实时监控都具有重要作用。该系统已为研究工作提供了大量数据
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oai:ir.semi.ac.cn:172111/18427
Last time updated on 29/11/2016