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热光Si共振腔型可调谐滤波器
Authors
余金中
左玉华
+5 more
成步文
李传波
毛容伟
王启明
黄昌俊
Publication date
1 January 2003
Publisher
Abstract
报道了利用Si基键合技术和化学机械抛光工艺制作的垂直结构的Fabry-Perot可调谐滤波器,调谐机理为pn结正向注入电流引起的热光效应。调谐范围可达23nm,响应时间约为300 μs,并给出了获得更快响应和更低能耗的热光和电注入可调谐滤波器件结构改进方案
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Last time updated on 29/11/2016