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带有Bragg反射镜的谐振腔增强型Si光电探测器
Authors
李成
王启明
赖虹凯
陈松岩
Publication date
1 January 2006
Publisher
Abstract
采用电子束蒸发和键合技术,制作了具有高反射率的、表面为薄层单晶Si的分布Bragg反射器。用标准光刻工艺在单晶Si薄层上制作出窄带谐振腔增强型(RCE)金属一半导体一金属(MSM)光电探测器,响应峰值波长分别在836、900、965和1030nm处,其中在900nm处峰值半高宽为18nm。该器件具有波长选择特性,可有效抑制相邻频道间的串扰,而且容易制成集成面阵
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Last time updated on 29/11/2016