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半导体量子阱材料微加工光子晶体的光学特性
Authors
孙增辉
张道中
+6 more
杜伟
熊志刚
许兴胜
金爱子
陈弘达
鲁琳
Publication date
1 January 2006
Publisher
Abstract
利用聚焦离子束刻蚀方法和电子柬制版结合干法刻蚀方法制备了二维近红外波段光子晶体,发现两种方法都可以制备出均匀的二维光子晶体,聚焦离子束方法操作简单,电子束制版结合干法刻蚀方法操作步骤复杂.光谱测试表明,利用聚焦离子束方法在有源材料上刻蚀的光子晶体不发光,而电子束制版结合干法刻蚀方法制备的小晶格常数光子晶体即使有些无序,其出光效率也提高到没有光子晶体时的两倍.对两种方法所加工的光子晶体不发光和提高出光效率的机理进行了分析
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Last time updated on 29/11/2016