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基于氮化铝缓冲层的硅基3C-碳化硅异质外延生长方法
Authors
刘兴昉
孙国胜
+6 more
曾一平
李家业
李晋闽
王雷
赵万顺
赵永梅
Publication date
8 October 2008
Publisher
Abstract
Abstract is not available.
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oai:ir.semi.ac.cn:172111/4213
Last time updated on 29/11/2016