多晶硅薄膜太阳电池的研究与进展

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Publication date
1 January 2005
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Abstract

从薄膜的沉积方式和沉积温度以及衬底材料等几方面综合分析了多晶硅薄膜制备工艺的特点及多晶硅薄膜太阳电池的最新研究进展。并以颗粒硅带(SSP)为衬底，采用快热化学气相沉积(RTCVD)法制备了多晶硅薄膜，随后制得的多晶硅薄膜太阳电池的效率达到6．05％

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